122AA-00010AB-S MKS

The 142AA-00010AB Heated Absolute Pressure Switch features 10 Torr full scale pressure measurement and a 0.5 inch OD tube fitting. It includes double pole Form C relay contacts that are energized when pressure is below the set point for Fail-safe operation. The 142A is a heated to 100°C, and is designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. Designed for applications where a DC signal output is not required, the 142A provides relay outputs that are readily interfaced with alarms, valve actuators, computers, process controllers, or other protection devices. Based on the well-known MKS Baratron® capacitance manometer principle of operation, the 142A senses the deflection of a diaphragm due to applied pressure, providing a switched output when pressure exceeds the chosen set point. An LED provides visual ”above set point” indication, and facilitates adjustment of the set point. The dual electrode sensor is an all-metal, all-welded design, thus exposing only corrosion-resistant Inconel to the process gases.

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描述

The 142AA-00010AB Heated Absolute Pressure Switch features 10 Torr full scale pressure measurement and a 0.5 inch OD tube fitting. It includes double pole Form C relay contacts that are energized when pressure is below the set point for Fail-safe operation. The 142A is a heated to 100°C, and is designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. Designed for applications where a DC signal output is not required, the 142A provides relay outputs that are readily interfaced with alarms, valve actuators, computers, process controllers, or other protection devices. Based on the well-known MKS Baratron® capacitance manometer principle of operation, the 142A senses the deflection of a diaphragm due to applied pressure, providing a switched output when pressure exceeds the chosen set point. An LED provides visual ”above set point” indication, and facilitates adjustment of the set point. The dual electrode sensor is an all-metal, all-welded design, thus exposing only corrosion-resistant Inconel to the process gases.

142AA-00010AB加热绝对压力开关具有10 Torr全量程压力测量和0.5英寸外径管件。它包括双极C型继电器触点，当压力低于故障安全操作的设定值时通电。142A被加热到100°C，旨在帮助最大限度地减少在LPCVD氮化、铝蚀刻和其他类型的工艺过程中可能发生的工艺污水积聚。专为不需要直流信号输出的应用而设计，142A提供继电器输出，易于与报警器、阀门执行器、计算机、过程控制器或其他保护设备连接。基于著名的MKS Baratron®电容压力计的工作原理，142A感应膜片由于施加压力的偏转，当压力超过所选的设定点时提供开关输出。LED提供可视的“以上设定值”指示，并便于调整设定值。双电极传感器是全金属，全焊接设计，因此只有耐腐蚀的铬镍合金暴露在工艺气体中。

The 142AA-00010AB Heated Absolute Pressure Switch features 10 Torr full scale pressure measurement and a 0.5 inch OD tube fitting. It includes double pole Form C relay contacts that are energized when pressure is below the set point for Fail-safe operation. The 142A is a heated to 100°C, and is designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. Designed for applications where a DC signal output is not required, the 142A provides relay outputs that are readily interfaced with alarms, valve actuators, computers, process controllers, or other protection devices. Based on the well-known MKS Baratron® capacitance manometer principle of operation, the 142A senses the deflection of a diaphragm due to applied pressure, providing a switched output when pressure exceeds the chosen set point. An LED provides visual ”above set point” indication, and facilitates adjustment of the set point. The dual electrode sensor is an all-metal, all-welded design, thus exposing only corrosion-resistant Inconel to the process gases.

 

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